In recent years, development of energy conversion systems using hydrogen as an energy source has been accelerated globally. Even though hydrogen is an environment-friendly energy source, safety and effectiveness issues in storage, transportation, and usage of hydrogen should be clearly resolved in every application. Therefore, sensors for detecting hydrogen leakage, especially for fuel cell electric vehicles, should be designed to have much higher resolution and accuracy in comparison with conventional gas sensors. In this study, we conducted to determine the design parameters for the semiconductor hydrogen sensor with optimized sensing conditions under the thermal distribution characteristic and thermal transfer characteristic. The heat generation study on power supply voltage was studied for correlation analysis of thermal energy according to the power supply voltage variation from 1.0 voltage to 10.0 voltage every 0.5 voltage. And we studied for the temperature coefficient of resistance with hydrogen sensor.