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Cross sensitivity and stability of FET - Based hydrogen sensors

Type of Publication
Year of Publication
2007
Authors

T. Galonska; C. Senft; W. Widanarto; O. Senftleben; I. Eisele; H.P. Frerichs; C. Wilbertz;

ISBN Number

1930-0395 978-1-4244-1261-7

Abstract

For safety reasons, while handling fuel cells, hydrogen concentrations of 0.1 - 3%2and above need to be detected. Low power hydrogen sensors, based on a Field Effect Transistor (FET), have been in use for about 25 years. In the past platinum and palladium were often used as gas sensitive layers. Unfortunately in the required concentration range, the Pt based sensors have a poor selectivity at room temperature and were not stable at operating temperatures above 60 degrees C. To solve this problem Pt with a porous tin oxide (SnO(2)) top layer is used as a chemically sensitive electrode in a Floating Gate Field Effect Transistor (FG - FET). The results show that the SnO(2) film on Pt stabilizes the sensor signal response between room temperature and 135 degrees C. Also the sensor response time with t(50)

DOI

10.1109/icsens.2007.4388582

Notes

Times Cited: 0 6th IEEE Sensors Conference Oct 28-31, 2007 Atlanta, GA IEEE Sensors Council 0

Pagination

1036-1039

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