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T.
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Nakakubo
Debray, A. ., Nakakubo, T. ., Yokoi, A. ., Mogi, S. ., Ueda, K. ., Shibata, M. ., … Fujita, H. . (2006). A micro-machined safety valve for power applications with improved sealing. Journal of Micromechanics and Microengineering, 16, S240-S247. https://doi.org/10.1088/0960-1317/16/9/S11
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