Dasgupta, N. P., Mack, J. F., Langston, M. C., Bousetta, A. ., & Prinz, F. B. (2010). Design of an atomic layer deposition reactor for hydrogen sulfide compatibility. Rev Sci Instrum, 81, 044102. https://doi.org/10.1063/1.3384349
LESSONS
LEARNED
Disclaimer: The Lessons Learned Database includes the incidents that were voluntarily submitted. The database is not a comprehensive source for all incidents that have occurred.