While attempting to light the hydrogen flare inside a Metalorganic Chemical Vapor Deposition (MOCVD) system burn box, a small explosion occurred, blowing the back section of the burn box off. Hydrogen flow was shut down immediately, and this MOCVD operation was suspended. Researchers made the determination that this was a minor incident and there were no injuries.
The follow-up investigation determined that the MOCVD HEPA filter had become sufficiently loaded to the point where performance of the burn box exhaust ventilation system was significantly degraded. The static pressure created across the "loaded" HEPA filter equaled the operating static pressure of the exhaust ventilation system servicing the burn box. This resulted in a region of "dead air" in the view more